| Authors: | P. Nenezic, J. Withouck, T. Vandekerckhove, M. Niels, V. Bonito-Oliva, M. Billet, B. Kuyken | | Title: | Wet etching of low loss lithium tantalate waveguides and heterogeneous lithium tantalate integration | | Format: | International Conference Proceedings | | Publication date: | 11/2025 | | Journal/Conference/Book: | 2025 IEEE PHOTONICS CONFERENCE, IPC
| | Editor/Publisher: | Accepted for publication, not yet published, | | Volume(Issue): | p.paper TuB4.2 (2 pages) | | Location: | singapore, Singapore | | Citations: | Look up on Google Scholar
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Abstract
A new wet etching process is developed for lithium tantalate waveguide fabrication and propagation losses are measured. With such process, low loss structures can be fabricated without requiring etching machinery. Furthermore, it opens possibilities in realizing heterogeneously integrated lithium tantalate modulators using waveguides. Related Research Topics
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