Abstract

A new wet etching process is developed for lithium tantalate waveguide fabrication and propagation losses are measured. With such process, low loss structures can be fabricated without requiring etching machinery. Furthermore, it opens possibilities in realizing heterogeneously integrated lithium tantalate modulators using waveguides.

Related Research Topics

• photonic-electronic integrated circuits for optical transceivers
• Chi(3) telecom-wavelength nonlinear optics in silicon-based waveguide circuits
• Chi(3) VIS/NIR nonlinear optics in silicon-based waveguide circuits
• Chi(2) nonlinear optics in silicon-based waveguide circuits
• Photonic integrated circuits for UV