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Authors: S. Selvaraja, K. De Vos, W. Bogaerts, P. Bienstman, D. Van Thourhout, R. Baets
Title: Effect of Device Density on the Uniformity of Silicon Nano-Photonic Waveguide Devices
Format: International Conference Proceedings
Publication date: 10/2009
Journal/Conference/Book: The 22nd Annual Meeting of the IEEE Photonics Society
Editor/Publisher: IEEE, 
Volume(Issue): p.311-312
Location: Belek-Antalya, Turkey
Internal Reference: [N-862]
Download: Download this Publication (732KB) (732KB)

Abstract

We report wavelength selective device nonuniformity of 1 nm over a 200 mm SOI wafer using CMOS fabrication technology. We also report correlation between device density and nonuniformity.

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