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Authors: D. Van Thourhout, W. Bogaerts, J. Brouckaert, P. Dumon, G. Roelkens, S. Scheerlinck, S. Selvaraja, J. Schrauwen, D. Taillaert, J. Van Campenhout, P. Bienstman, R. Baets
Title: Silicon nanophotonics on CMOS
Format: International Conference Proceedings
Publication date: 9/2007
Journal/Conference/Book: 33rd International Conference on Micro- and Nano-Engineering 2007 (MNE07)
Volume(Issue): p.113-114
Location: Copenhagen, Denmark
Internal Reference: [N-662]
Download: Download this Publication (993KB) (993KB)

Abstract

Key words: nanophotonics, deep UV lithography, CMOS, integrated prhotonics


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