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Authors: R. Baets, W. Bogaerts
Title: Nanophotonic waveguides in SOI by means of deep UV lithography
Format: International Conference Presentation
Publication date: 3/2004
Journal/Conference/Book: Photonic and Electromagnetic Crystal Structures (PECS-V) (invited)
Volume(Issue): p.160
Location: Kyoto, Japan
Internal Reference: [N-286]
Download: Download this Publication (234KB) (234KB)

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