| Authors: | C. Marchese, Q. Deng, C. Haffner, P. Verheyen, F. Ferraro, H. Goktas, Y. Ban, M. Chakrabarti, D. Velenis, E. Jadli, J. Van Campenhout, W. Bogaerts | | Title: | Nano-opto-electro-mechanical phase shifter integrated in silicon photonic circuits and fabrication methods | | Format: | International Conference Proceedings | | Publication date: | 4/2026 | | Journal/Conference/Book: | IEEE Silicon Photonics Conference
| | Volume(Issue): | p.WA3 | | Location: | Ottawa, Canada | | DOI: | 10.1109/SiPhotonics68911.2026.11520733 | | Citations: | Look up on Google Scholar
| | Download: |
 (676KB) |
Abstract
A silicon photonic integrated MEMS-based optical phase shifter is proposed to overcome the limitations of the conventional thermo-optic phase tuners using local heaters. Device concept, fabrication process and first experimental results are presented. Related Research Topics
|
|
