Authors:	P. Edinger, A.Y. Takabayashi, C. Antony, P. Verheyen, U. Khan, W. Bogaerts, N. Quack, K.B. Gylfason
Title:	A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits
Format:	International Conference Proceedings
Publication date:	7/2023
Journal/Conference/Book:	Advanced Photonics Congress
Editor/Publisher:	Optica Publishing Group,
Volume(Issue):	p.ITu1A.2 (2 pages)
Location:	Busan,
DOI:	10.1364/IPRSN.2023.ITu1A.2
Citations:	Look up on Google Scholar
Download:	(576KB)

Abstract

Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.

Related Research Topics

• MEMS and NEMS optical actuators in SOI

Related Projects

• H2020: MORPHIC (MEMS-based zerO-power Reconfigurable Photonic ICs)
• Horizon Europe: PHORMIC (Wafer-scale platform for Photonic Programmable Multipurpose Integrated Circuits)