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Authors: K. Rajendran, A. Pandey, P. Edinger, G. Jo, A.Y. Takabayashi, U. Khan, P. Verheyen, N. Quack, F. Niklaus, W. Bogaerts, K. Gylfason, D. Van Thourhout
Title: Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform
Format: International Conference Proceedings
Publication date: 12/2021
Journal/Conference/Book: IEEE International Conference on Group IV Photonics
Editor/Publisher: IEEE , 
DOI: 10.1109/GFP51802.2021.9673877
Citations: Look up on Google Scholar
Download: Download this Publication (1.6MB) (1.6MB)


The thermal motion of a vacuum packaged, sus-pended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be 1.77+-0.022fm / Hz^-1/2

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