| Authors: | W. Bogaerts, U. Khan, Y. Xing | | Title: | Layout-Aware Yield Prediction of Photonic Circuits | | Format: | International Conference Proceedings | | Publication date: | 8/2018 | | Journal/Conference/Book: | IEEE International Conference on Group IV Photonics
| | Editor/Publisher: | IEEE, | | Volume(Issue): | p.p93-93 (WD5) | | Location: | Cancun, Mexico | | DOI: | 10.1109/GROUP4.2018.8478734 | | Citations: | 4 (Dimensions.ai - last update: 21/12/2025)
4 (OpenCitations - last update: 27/6/2025)
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Abstract
We demonstrate yield prediction of silicon wavelength filter circuits using layout-aware Monte-Carlo circuit simulations. Maps of wafer and die-level variability of width and thickness are projected onto circuit layout and translated into changes of circuit model parameters. We apply this onto Mach-Zehnder lattice filters to study yield for different filter orders. Related Research Topics
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