Authors: | P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets | Title: | Low-loss SOI Photonic Wires and Ring Resonators Fabricated with Deep UV Lithography | Format: | International Journal | Publication date: | 5/2004 | Journal/Conference/Book: | IEEE Photonics Technology Letters
| Volume(Issue): | 16(5) p.1328-1330 | DOI: | 10.1109/lpt.2004.826025 | Citations: | 358 (Dimensions.ai - last update: 29/9/2024) 259 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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Abstract
We demonstrate single-mode photonic wires in Silicon-on-insulator with propagation loss as low as 2.4dB/cm, fabricated with deep UV lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk Related Research Topics
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