Authors:	P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets
Title:	Low-loss SOI Photonic Wires and Ring Resonators Fabricated with Deep UV Lithography
Format:	International Journal
Publication date:	5/2004
Journal/Conference/Book:	IEEE Photonics Technology Letters
Volume(Issue):	16(5) p.1328-1330
DOI:	10.1109/lpt.2004.826025
Citations:	363 (Dimensions.ai - last update: 21/12/2025) 259 (OpenCitations - last update: 3/5/2025) Look up on Google Scholar
Download:	(160KB)

Abstract

We demonstrate single-mode photonic wires in Silicon-on-insulator with propagation loss as low as 2.4dB/cm, fabricated with deep UV lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk

Related Research Topics

• Silicon (nano)photonic devices fabrication with 193nm and 248nm (DUV) Optical lithography (1999-2012)
• Low-loss Nanophotonic waveguides (1999-2010)
• WDM components

Related Projects

• IST: PICCO (Photonic Integrated Circuits using photonic Crystal Optics)
• IAP-V: PHOTON (Photons and Photonics : from basic physics to system concepts)