| Authors: | K. Rajendran, A. Pandey, P. Edinger, G. Jo, A.Y. Takabayashi, U. Khan, P. Verheyen, N. Quack, F. Niklaus, W. Bogaerts, K. Gylfason, D. Van Thourhout | | Title: | Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform | | Format: | International Conference Proceedings | | Publication date: | 12/2021 | | Journal/Conference/Book: | IEEE International Conference on Group IV Photonics
| | Editor/Publisher: | IEEE , | | DOI: | 10.1109/GFP51802.2021.9673877 | | Citations: | Look up on Google Scholar
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Abstract
The thermal motion of a vacuum packaged, sus-pended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be 1.77+-0.022fm / Hz^-1/2 Related Projects
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