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Authors: G. Yurtsever, K. Komorowska, R. Baets
Title: Low Dispersion Integrated Michelson Interferometer on Silicon on Insulator for Optical Coherence Tomography
Format: International Conference Proceedings
Publication date: 9/2011
Journal/Conference/Book: Conference on Optical Coherence Tomography and Coherence Techniques V
Editor/Publisher: Proceedings of SPIE-OSA Biomedical Optics, 
Volume(Issue): 8091(80910T)
Location: Munich, Germany
Internal Reference: [N-1169]
DOI:
Download: Download this Publication (699KB) (699KB)

Abstract

We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon
waveguides of the interferometer are designed with GVD less than 50 ps/nm.km. The footprint of the device is 0.5mm x 3mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed.

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