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Authors: S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, R. Baets
Title: Amorphous silicon photonic crystals made with 193nm lithography
Format: International Conference Presentation
Publication date: 4/2009
Journal/Conference/Book: The 8th International Photonic & Electromagnetic Crystal Structures Meeting (PECS)
Location: Sydney, Australia
Internal Reference: [N-918]
Download: Download this Publication (86KB) (86KB)

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