| Authors: | S. Selvaraja, W. Bogaerts, D. Van Thourhout, R. Baets |
| Title: | Fabrication of Uniform Photonic Devices Using 193nm Optical Lithography in Silicon-on-Insulator |
| Format: | International Conference Proceedings |
| Publication date: | 6/2008 |
| Journal/Conference/Book: | 14th European Conference on Integrated Optics (ECIO)
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| Location: | Eindhoven, Netherlands |
| Citations: | Look up on Google Scholar
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| Download: |
 (167KB) |
