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Authors: S. Selvaraja, W. Bogaerts, D. Van Thourhout, R. Baets
Title: Fabrication of Uniform Photonic Devices Using 193nm Optical Lithography in Silicon-on-Insulator
Format: International Conference Proceedings
Publication date: 6/2008
Journal/Conference/Book: 14th European Conference on Integrated Optics (ECIO)
Location: Eindhoven, Netherlands
Internal Reference: [N-716]
Download: Download this Publication (167KB) (167KB)

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