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Authors: S. Scheerlinck, D. Van Thourhout, R. Baets
Title: UV-based Nano Imprint Fabrication of Gold Grating Couplers on Silicon-on-Insulator
Format: International Conference Proceedings
Publication date: 7/2007
Journal/Conference/Book: 2007 Digest of the IEEE/LEOS Summer Topicals Meetings
Volume(Issue): p.MB3.4
Location: Oregon, United States
Internal Reference: [N-631]
Download: Download this Publication (1.3MB) (1.3MB)

Abstract

Fiber-to-waveguide gold grating couplers are fabricated using UV-based Nano
Imprint Lithography and lift-off on top of an unprocessed Silicon-on-Insulator chip. Over 22%
efficiency and a 1dB bandwidth of 36nm is demonstrated in the telecom band.

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