Authors:	S. Scheerlinck, J. Schrauwen, D. Taillaert, D. Van Thourhout, R. Baets
Title:	Efficient, broadband and compact metal grating couplers fo silicon-on-insulator
Format:	International Conference Presentation
Publication date:	5/2007
Journal/Conference/Book:	CLEO/QELS 2007
Location:	Baltimore, United States
Citations:	Look up on Google Scholar
Download:	(171KB)

Abstract

Metal grating couplers for silicon-on-insulator waveguides are proposed. A silver grating coupler with 33 % efficiency is designed. A gold grating coupler prototype is fabricated using Focused Ion Beams demonstrating over 10 % coupling efficiency.

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• Focused-ion-beam fabrication (2005-2011)

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