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Authors: I. De Vlaminck, J. Roels, D. Taillaert, D. Van Thourhout, L. Lagae, R. Baets, G. Borghs
Title: Integrated nanomechanical motion detection by evanescent light-wave coupling
Format: International Conference Proceedings
Publication date: 1/2007
Journal/Conference/Book: SPIE Photonics West (MOEMS/MEMS)
Location: San Jose, United States
Internal Reference: [N-630]
Download: Download this Publication (3.3MB) (3.3MB)

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