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Authors: S. Scheerlinck, D. Van Thourhout, R. Baets
Title: UV-NIL with a DUV-fabricated silicon template as a flexible tool for nanopatterning
Format: International Conference Proceedings
Publication date: 9/2006
Journal/Conference/Book: Micro- and Nano-Engineering 2006, 32nd International Conference, MNE 2006
Volume(Issue): p.121-122
Location: Barcelona, Spain
Internal Reference: [N-535]
Download: Download this Publication (2.3MB) (2.3MB)

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