| Authors: | S. Scheerlinck, D. Van Thourhout, R. Baets | | Title: | UV-NIL with a DUV-fabricated silicon template as a flexible tool for nanopatterning | | Format: | International Conference Proceedings | | Publication date: | 9/2006 | | Journal/Conference/Book: | Micro- and Nano-Engineering 2006, 32nd International Conference, MNE 2006
| | Volume(Issue): | p.121-122 | | Location: | Barcelona, Spain | | Citations: | Look up on Google Scholar
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