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Authors: S. Scheerlinck, D. Van Thourhout, R. Baets
Title: Replication of SOI Photonic Structures by Nano-Imprintlithography
Format: International Conference Proceedings
Publication date: 5/2004
Journal/Conference/Book: IEEE/LEOS Benelux Chapter, Workshop on Photonic Materials and Technology
Volume(Issue): p.16
Location: Eindhoven, Netherlands
Internal Reference: [N-310]

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