| Authors: | A. Djuphammar, Y. Chen, P. Edinger, C. Antony, S. Janssen, W. Bogaerts, K.B. Gylfason | | Title: | Feedback Control of an Integrated MEMS-Tunable Silicon Photonic Ring-Resonator | | Format: | International Conference Proceedings | | Publication date: | 8/2026 | | Journal/Conference/Book: | 2026 International Conference on Optical MEMS and Nanophotonics (OMN)
| | Location: | Saint-Alexis-des-Monts, Canada | | DOI: | 10.1109/OMN70392.2026.11646643 | | Citations: | Look up on Google Scholar
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Abstract
We demonstrate a dither-locking scheme that stabilizes an integrated silicon photonic ring-resonator add-drop filter to an external laser wavelength using an electrostatic MEMS phase tuner. We achieve a millisecond-scale step response, highlighting MEMS actuation as a route to low-power stabilization. Related Research Topics
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