K. Akritidis, G. Jeevanandam, M. Reza, M. Billet, J. Song, S. Saseendran, V. Prakasam, J.-P. Koester, J. Fricke, G. Roelkens, M. Weyers, R. Jansen, P. Van Dorpe, B. Kuyken
Title:
200 mm dual-layer SiN heterogeneous integration platform for visible and near-infrared applications
