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Authors: T. Vanmaele, E. Lievens, K. De Geest, E. Picavet, A. Laement, D. Van Thourhout, P. Bienstman, J. Beeckman
Title: Active Trimming of High-Speed SiN Photonic Micro Ring Resonators Using Thin Film Ferroelectrics
Format: International Journal
Publication date: 3/2026
Journal/Conference/Book: Nanophotonics
Editor/Publisher: Wiley, 
Volume(Issue): 15(7)
DOI: NanoPhotonics
Citations: Look up on Google Scholar

Abstract

Fabrication of photonic devices needs nanometer-scale precision for devices to be in the optimal point of operation. Achieving this precision typically requires complex and costly post-fabrication processes or thermo-optic tuning using resistive heaters. In this work, we demonstrate active trimming of ring resonators on a SiN platform using a PZT cladding layer. A DC bias is applied in order to tune an optical modulator in the optimal point of operation while maintaining a constant high-frequency response. This approach is promising for high-speed applications where precise tuning is critical.


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