| Authors: | M. Van Daele, M.B. E. Griffiths, A. Raza, M.M. Minjauw, S.T. Barry, R. Baets, C. Detavernier, J. Dendooven | | Title: | Near room temperature plasma enhanced atomic layer deposition of gold metal | | Format: | International Conference Proceedings | | Publication date: | Accepted for publication. Not yet published | | Journal/Conference/Book: | EuroCVD 22 - Baltic ALD
| | Location: | Luxembourg, Luxembourg | | Citations: | Look up on Google Scholar
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