| Authors: | Y. Xing, U. Khan, Y. Ye, W. Bogaerts | | Title: | Extracting Fabricated Geometry on Die-Level | | Format: | International Conference Poster | | Publication date: | 11/2017 | | Journal/Conference/Book: | 2017 IEEE Photonics Scociety Benelux Annual Symposium
| | Volume(Issue): | p.148-151 | | Location: | Delft, Netherlands | | Citations: | Look up on Google Scholar
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Abstract
We extract fabricated linewidth and thickness of SOI waveguides on a die fabricated by imec MPW service. Strong local location-dependent correlation is presented in the thickness variation while no such correlation is observed for the linewidth. Related Research Topics
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