| Authors: | A. Hermans, M. Van Daele, C. Kieninger, J. Dendooven, S. Clemmen, C. Detavernier, C. Koos, R. Baets | | Title: | CMOS-Compatible ALD Zinc Oxide Coating for On-Chip Second-Order Nonlinear Optical Functionalities | | Format: | International Conference Proceedings | | Publication date: | 5/2017 | | Journal/Conference/Book: | Conference on Lasers and Electro-Optics 2017
| | Volume(Issue): | p.SM3K.3 | | Location: | San Jose, United States | | DOI: | 10.1364/CLEO_SI.2017.SM3K.3 | | Citations: | 1 (Dimensions.ai - last update: 21/12/2025)
1 (OpenCitations - last update: 27/6/2025)
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