| Authors: | J.F.I.B Hoste, B.G. De Geest, P. Bienstman |
| Title: | Determination of thickness and density of a wet multilayer polymer system with sub-nanometer resolution by means of a dual polarization silicon-on-insulator microring |
| Format: | International Conference Proceedings |
| Publication date: | 2/2015 |
| Journal/Conference/Book: | SPIE Photonics West
|
| Volume(Issue): | p.paper 9337-13 |
| Location: | San Francisco, CA, United States |
| DOI: | 10.1117/12.2079074 |
| Citations: | Look up on Google Scholar
|
| Download: |
 (1.5MB) |
