| Authors: | A. Masood, M. Pantouvaki, D. Goossens, G. Lepage, P. Verheyen, D. Van Thourhout, P. Absil, W. Bogaerts | | Title: | CMOS compatible heater fabrication approaches for thermal tuning of photonics devices | | Format: | International Conference Proceedings | | Publication date: | 11/2012 | | Journal/Conference/Book: | Proceedings of the 2012 Annual Symposium of the IEEE Photonics Society Belenux Chapter
| | Volume(Issue): | p.307-310 | | Location: | Mons, Belgium | | Citations: | Look up on Google Scholar
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Abstract
Thennal tuning is widely used method /01' precise wavelength selectivity in various integrated photonic devices. Since silicon photonics is gaining wider acceptance for communication and sensing devices, CMOS compatibility • in fabrication method as
well as post fabrication integration - Is gaining prominence. That makes it relevant to explore heater fabrication approaches for silicon photonics, which are highly compatible with CMOS and €ifficienf in junctionality. We present an overview of such
different approaches currently being developed by us. Related Research Topics
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