| Authors: | E. Hallynck, P. Bienstman |
| Title: | Integrated Differential Pressure Sensor in Silicon-on-Insulator |
| Format: | International Conference Proceedings |
| Publication date: | 9/2012 |
| Journal/Conference/Book: | IEEE Photonics Conference 2012
|
| Volume(Issue): | p.445-446 |
| Location: | Burlingame, California, United States |
| DOI: | 10.1109/ipcon.2012.6358684 |
| Citations: | Look up on Google Scholar
|
| Download: |
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