| Authors: | S. Rudra, J. Roels, G. Bryce, L. Haspeslagh , A. Witvrouw , D. Van Thourhout | | Title: | SiGe based Grating Light Valves: A leap towards monolithic integration of MOEMS | | Format: | International Journal | | Publication date: | 2/2010 | | Journal/Conference/Book: | Microelectronic Engineering
| | Volume(Issue): | 87 p.1195-1197 | | DOI: | 10.1016/j.mee.2009.12.015 | | Citations: | 3 (Dimensions.ai - last update: 21/12/2025)
1 (OpenCitations - last update: 3/5/2025)
Look up on Google Scholar
| | Download: |
 (500KB) |
Related Research Topics
Related Projects
|
|
