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Authors: S. Rudra, J. Roels, G. Bryce, L. Haspeslagh , A. Witvrouw , D. Van Thourhout
Title: SiGe based Grating Light Valves: A leap towards monolithic integration of MOEMS
Format: International Journal
Publication date: 2/2010
Journal/Conference/Book: Microelectronic Engineering
Volume(Issue): 87 p.1195-1197
DOI: 10.1016/j.mee.2009.12.015
Citations: 3 ( - last update: 14/7/2024)
1 (OpenCitations - last update: 3/5/2024)
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