Authors: | T. Claes, J. Girones Molera, K. De Vos, E. Schacht, R. Baets, P. Bienstman | Title: | Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator | Format: | International Journal | Publication date: | 9/2009 | Journal/Conference/Book: | IEEE Photonics Journal
| Editor/Publisher: | IEEE, | Volume(Issue): | 1(3) p.197-204 | DOI: | 10.1109/JPHOT.2009.2031596 | Citations: | 357 (Dimensions.ai - last update: 29/9/2024) 197 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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Abstract
We present a slot-waveguide-based ring resonator in silicon on insulator (SOI) with a footprint of only 13 µm times 10 µm, fabricated with optical lithography. Experiments show that it has 298 nm/RIU sensitivity and a detection limit of 4.2 e-5 RIU for changes in the refractive index of the top cladding. We prove for the first time that surface chemistry for selective label-free sensing of proteins can be applied inside a 100 nm-wide slot region and demonstrate that the application of a slot waveguide instead of a normal waveguide increases the sensitivity of an SOI ring resonator with a factor 3.5 for the detection of proteins. Related Research Topics |
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