Photonics Research Group Home
Ghent University Journals/Proceedings
About People Research Publications Education Services
 IMEC
intern

 

Publication detail

Authors: S. Selvaraja, Erik Sleeckx, Marc Schaekers, W. Bogaerts, D. Van Thourhout, P. Dumon, R. Baets
Title: Low-Loss Amorphous Silicon-On-Insulator Technology for Photonic Integrated Circuitry
Format: International Journal
Publication date: 5/2009
Journal/Conference/Book: Optics Communications
Editor/Publisher: Elsevier B.V, 
Volume(Issue): 282(9) p. 1767-1770
DOI: 10.1016/j.optcom.2009.01.021
Citations: 114 (Dimensions.ai - last update: 8/12/2024)
85 (OpenCitations - last update: 3/5/2024)
Look up on Google Scholar
Download: Download this Publication (1002KB) (1002KB)

Abstract

We report the fabrication of low-loss amorphous silicon photonic wires deposited by plasma enhanced chemical vapor deposition. Single mode photonic wires were fabricated by 193nm optical lithography and dry etching. Propagation loss measurements show a loss of 3.46dB/cm for photonic wires (480X220nm) and 1.34dB/cm for ridge waveguides.

Related Research Topics

Related Projects

Citations (OpenCitations)

Back to publication list