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Authors: J. Schrauwen, J. Van Lysebettens, T. Claes, K. De Vos, P. Bienstman, D. Van Thourhout, R. Baets
Title: Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators
Format: International Journal
Publication date: 12/2008
Journal/Conference/Book: IEEE Photonics Technology Letters
Volume(Issue): 20(23) p.2004
DOI: 10.1109/lpt.2008.2006001
Citations: 21 ( - last update: 19/5/2024)
16 (OpenCitations - last update: 3/5/2024)
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We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 $mu {hbox{m}}$.

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