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Authors: S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, R. Baets
Title: Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides
Format: International Journal
Publication date: 7/2007
Journal/Conference/Book: Optics Express
Editor/Publisher: Optical Society of America, 
Volume(Issue): 15 p.9639-9644
DOI: 10.1109/cleo.2007.4452981
Citations: 3 ( - last update: 21/7/2024)
2 (OpenCitations - last update: 3/5/2024)
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Compact metal grating couplers for efficient and broadband coupling between optical fibers and silicon-on-insulator waveguides are proposed and demonstrated. Simulation results for silver, gold, aluminum and copper grating couplers are presented. Using a uniform silver grating, coupling efficiencies are calculated as high as 60 % at a wavelength of 1.55 ìm. Metal grating couplers require only one single etching or lift-off step and are therefore very easy to fabricate. As a proof of principle, a gold grating coupler for near-vertical fiber-to-waveguide coupling was fabricated using e-beam writing and lift-off, demonstrating 34 % coupling efficiency and a 1 dB-bandwidth of 40 nm. Measurement data and simulation results are in good agreement.

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