Authors:	S. Scheerlinck, D. Van Thourhout, R. Baets
Title:	UV-based Nano Imprint Fabrication of Gold Grating Couplers on Silicon-on-Insulator
Format:	International Conference Proceedings
Publication date:	7/2007
Journal/Conference/Book:	2007 Digest of the IEEE/LEOS Summer Topicals Meetings
Volume(Issue):	p.MB3.4
Location:	Oregon, United States
DOI:	10.1109/leosst.2007.4288342
Citations:	Look up on Google Scholar
Download:	(1.3MB)

Abstract

Fiber-to-waveguide gold grating couplers are fabricated using UV-based Nano
Imprint Lithography and lift-off on top of an unprocessed Silicon-on-Insulator chip. Over 22%
efficiency and a 1dB bandwidth of 36nm is demonstrated in the telecom band.

Related Research Topics

• Nanoscale Patterning by Nano Imprint Lithography (2004-2009)

Related Projects

• GOA: UGent GOA biosensor project
• IAP: Photonics@be (Photonics@be)