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Authors: J. Roels, I. De Vlaminck, D. Van Thourhout, L. Lagae, D. Taillaert, R. Baets
Title: A nanophotonic NEMS-modulator in Silicon-on-Insulator
Format: International Conference Proceedings
Publication date: 12/2006
Journal/Conference/Book: 2006 Annual Symposium of the IEEE/LEOS Benelux Chapter
Location: Eindhoven, Netherlands
Citations: Look up on Google Scholar
Download: Download this Publication (826KB) (826KB)


In order to achieve fast all optical switching in communication networks, a compact,
low cost, integrated optical switch is needed. Nanophotonic integrated circuits in
silicon-on-insulator (high-index contrast) are well-suited for this purpose. Nevertheless
it is hard to obtain a strong light modulation effect in silicon.
In this paper we demonstrate light modulation by moving a nanophotonic waveguide
(NEMS = nano-electromechanical system). We also fabricated and characterized
passive directional couplers. Both achievements are an important step towards a 2x2
nanophotonic NEMS-switch.

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