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Authors: J. Schrauwen, D. Van Thourhout, R. Baets
Title: Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides
Format: International Conference Poster
Publication date: 9/2006
Journal/Conference/Book: IEEE Group IV Photonics
Volume(Issue): P20
Location: Ottawa, Canada
DOI: 10.1109/group4.2006.1708179
Citations: 1 ( - last update: 19/5/2024)
1 (OpenCitations - last update: 3/5/2024)
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We fabricated grating couplers in silicon-on-insulator waveguides with focused-ion-beam. First devices were
very lossy, but by using selective etchant and a hard mask we obtained efficiencies comparable to traditional fabrication techniques.

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