| Authors: | J. Schrauwen, D. Van Thourhout, R. Baets | | Title: | Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides | | Format: | International Conference Poster | | Publication date: | 9/2006 | | Journal/Conference/Book: | IEEE Group IV Photonics
| | Volume(Issue): | P20 | | Location: | Ottawa, Canada | | DOI: | 10.1109/group4.2006.1708179 | | Citations: | 1 (Dimensions.ai - last update: 21/12/2025)
1 (OpenCitations - last update: 3/5/2025)
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Abstract
We fabricated grating couplers in silicon-on-insulator waveguides with focused-ion-beam. First devices were
very lossy, but by using selective etchant and a hard mask we obtained efficiencies comparable to traditional fabrication techniques. Related Research Topics
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