| Authors: | W. Bogaerts, V. Wiaux, D. Taillaert, S. Beckx, R. Baets |
| Title: | SOI Photonic Crystal components fabricated with deep UV lithography |
| Format: | International Workshop |
| Publication date: | 10/2002 |
| Journal/Conference/Book: | PECS-IV
|
| Volume(Issue): | p.40 |
| Location: | Los Angeles, United States |
| Citations: | Look up on Google Scholar
|
| Download: |
(244KB) |