| Authors: | W. Bogaerts, D. Taillaert, R. Baets, V. Wiaux, S. Beckx, M. Maenhoudt, G. Vandenberghe |
| Title: | SOI Photonic Crystal Fabrication Using Deep UV Lithography |
| Format: | International Conference Proceedings |
| Publication date: | 6/2001 |
| Journal/Conference/Book: | PECS III
|
| Location: | St. Andrews, United Kingdom |
| Citations: | Look up on Google Scholar
|
| Download: |
 (778KB) |
