PhD. of Wim Bogaerts

Author: Wim Bogaerts Promotor: Roel Baets Dutch Title: Nanofotonische Golfgeleiders en Fotonische Kristallen in Silicium-op-Isolator English Title: Nanophotonic Waveguides and Photonic Crystals in Silicon-on-Insulator Date: 19/4/2004 Main Language: Dutch / English Thesis: (10.4MB) Presentation: (7.5MB)

Abstract

In this work a number of aspects of planar nanophotonics and photonic crystals have been explored. Various mechanisms of propagation losses in these waveguides were modelled, and a comparison between low-index-contrast structures and high-index-contrast structures was made. The thus acquired insight led to a number of waveguide designs.
The designs were implemented in Silicon-on-Insulator using deep UV lithography. For this, the fabrication process was thouroughly characterised and various obstacles were overcome. The resulting structures are of very high quality and record-low propagation losses for photonic wires were demonstrated.

Related Research Topics

• Silicon (nano)photonic devices fabrication with 193nm and 248nm (DUV) Optical lithography (1999-2012)
• Grating-based based vertical fibre coupler (1999-2012)
• Low-loss Nanophotonic waveguides (1999-2010)
• CAMFR: an efficient eigenmode expansion tool (1998-2009)