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Methods for Improving Integrated Photonic Device Uniformity
| Inventors: | S. Selvaraja
, P. Absil | | Title: | Methods for Improving Integrated Photonic Device Uniformity |
| Patent Nr: |
US-9039907 B2 (Granted,
5/2015) | | Patent Nr: |
EP-2549224 B1 (Granted,
5/2016) |
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