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Authors: H. Sattari, A.Y. Takabayashi, P. Edinger, P. Verheyen, K.B Gylfason, W. Bogaerts, N. Quack
Title: Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process
Format: International Journal
Publication date: 10/2022
Journal/Conference/Book: Journal of Optical Microsystems
Editor/Publisher: SPIE, 
Volume(Issue): 2(4) p.044001
DOI: 10.1117/1.JOM.2.4.044001
Citations: 4 ( - last update: 19/5/2024)
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Photonic add-drop filters are crucial components for the implementation of wavelength division 21 multiplexing (WDM) in fiber-optic communication systems. The recent progress in photonic integration has shown 22 the potential to integrate photonic add-drop filters alongside high-performance photonic building blocks on chip, to 23 construct compact and complex photonic integrated circuits for WDM. Typically, implementations are based on 24 micro-ring resonators with integrated heaters or free carrier dispersion-based modulators to adjust the filter 25 wavelength. However, heaters suffer from high power consumption, and free carriers result in optical absorption 26 losses, limiting the scalability towards very-large-scale circuits. We demonstrate the design, simulation, fabrication, 27 and experimental characterization of a compact add-drop filter based on a vertically movable, MEMS-actuated ring 28 resonator. The MEMS-actuated add-drop filter is implemented in IMEC’s iSiPP50G silicon photonics platform and 29 realized using a short post-processing flow to safely release the suspended MEMS structures in a wafer-level 30 compatible process. The filter exhibits a through port linewidth of 1 nm (124.37 GHz) at 1557.1 nm, and it retains 31 a port extinction of 20 dB and a port isolation of > 50 dB under 27 V of actuation voltage. The combination of low 32 power consumption and a compact footprint demonstrates the suitability for very-large-scale integration in photonic 33 circuits.

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