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Authors: N. Quack, A.Y. Takabayashi, H. Sattari, P. Edinger, K.B. Gylfason, G. Jo, F. Niklaus, P. Verheyen, M. Jezzini, U. Khan, I. Zand, W. Bogaerts
Title: Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics
Format: International Conference Proceedings
Publication date: 10/2021
Journal/Conference/Book: IEEE Photonics Conference (invited)
DOI: 10.1109/IPC48725.2021.9593009
Citations: Look up on Google Scholar
Download: Download this Publication (486KB) (486KB)


Recent advances in integration of Nano-Opto-Electromechanical Systems in Silicon Photonics enable fundamental photonic operations such as switching, phase shifting or power equalization on-chip. The unique combination of high optical efficiency, low electric power consumption and compact footprint, provides outstanding opportunities in scalability to large-scale photonic integrated circuits.

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