Authors: | B. Ouyang, Y. Li, M. Kruidhof, R. Horsten, R. Baets, K.W.A. van Dongen, J. Caro |
Title: | Highly sensitive silicon Mach-Zehnder interferometer based ultrasound sensor |
Format: | International Conference Proceedings |
Publication date: | 2/2020 |
Journal/Conference/Book: | SPIE Photonics West Conference
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Volume(Issue): | 11283 p.paper 112830R1 (9 pages) |
Location: | San Francisco, United States |
DOI: | 10.1117/12.2539573 |
Citations: | 2 (Dimensions.ai - last update: 29/9/2024) 1 (OpenCitations - last update: 27/6/2024) Look up on Google Scholar
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