Authors: | P. Neutens, A. Subramanian, M. Ul Hassan, C. Chen, R. Jansen, T. Claes, X. Rottenberg, B. Du Bois, K. Leyssens, P. Helin, S. Severi, A. Dhakal, F. Peyskens, L. Lagae, P. Deshpande, R. Baets, P. Van Dorpe | Title: | Characterization of PECVD silicon nitride photonic components at 532 and 900 nm wavelength | Format: | International Conference Proceedings | Publication date: | 4/2014 | Journal/Conference/Book: | 4th Conference on Silicon Photonics and Photonic Integrated Circuits
| Volume(Issue): | p.article 91331F ( 6 pages) | Location: | Brussels, Belgium | DOI: | 10.1117/12.2052119 | Citations: | 3 (Dimensions.ai - last update: 6/10/2024) 2 (OpenCitations - last update: 27/6/2024) Look up on Google Scholar
| Download: |
(561KB) |
|
|