Abstract
Silicon nitride (Si3N4) is a promising high index material for dense photonic circuits in the visible-mid infrared photonic applications. Experimental results are presented for the first time for linear and focused grating couplers at near infrared wavelength (around 900nm) for PECVD Si3N4 wires (220 nm × 500 nm). An efficiency of (6.2 dB, 6.5 dB) and 1 dB bandwidth of (26 nm, 40 nm) is reported for the linear and focused grating couplers respectively. Related Research Topics
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