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Authors: D. Korn, L. Alloati, M. Lauermann, J. Pfeifle, R. Palmer, P.C. Schindler, W. Freude, C. Koos, J. Leuthold, H. Yu, W. Bogaerts, K. Komorowska, R. Baets, J. Van Campenhout, P. Verheyen, J. Wouters, M. Moelants, P. Absil, A. Secchi, M. Dispenza, M. Jazbinsek, P. Gunter, S. Wehrli, M. Bossard, P. Zakynthinos, I. Tomkos
Title: Silicon-Organic Hybrid Fabrication Platform for Integrated Circuits
Format: International Conference Proceedings
Publication date: 7/2012
Journal/Conference/Book: ICTON 2012 (invited)
Volume(Issue): p.paper Th.A5.5
Location: Coventry, United Kingdom
Internal Reference: [N-1276]
Download: Download this Publication (260KB) (260KB)

Abstract

The combination of CMOS compatible Silicon-On-Insulator (SOI) fabrication technology with organic cover materials constitutes the Silicon-Organic Hybrid (SOH) fabrication platform, which shows innovative functionality for the making of integrated optical circuits. We report on experimental demonstrations of essential building blocks for transceivers, while relying only on well-known SOI processing steps and simple post processing of the organic materials.

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