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Authors: A. Subramanian, S. Selvaraja, A. Dhakal, K. Komorowska, R. Baets
Title: Grating couplers for Si3N4 waveguides at 900 nm
Format: International Conference Proceedings
Publication date: 4/2012
Journal/Conference/Book: 16th European Conference on Integrated Optics (ECIO 2012)
Volume(Issue): p.paper 182
Location: Barcelona, Spain
Internal Reference: [N-1286]
Download: Download this Publication (328KB) (328KB)

Abstract

We demonstrate a 1-D grating coupler for silicon nitride wires with an average efficiency of 7 dB in the 890-910 nm wavelength range. The effect of etch depth on the grating efficiency is presented and compared with the theoretical results


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