Authors:	J. Roels, B. Maes, R. Baets, D. Van Thourhout
Title:	Integrated optomechanical circuits
Format:	International Conference Proceedings
Publication date:	7/2010
Journal/Conference/Book:	Integrated Photonics Research, Silicon and Nano Photonics (IPR) 2010 (invited)
Location:	Monterey, United States
DOI:	10.1364/iprsn.2010.imf4
Citations:	Look up on Google Scholar
Download:	(234KB)

Abstract

Optomechanical circuits are a promising candidate to realize various signal processing
functions on a chip. In this paper we review several different NOMS structures fabricated in a
silicon-on-insulator platform.

Related Research Topics

• Silicon optomechanics