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Authors: K. Watanabe, J. Schrauwen, A. Leinse, D. Van Thourhout, R. Heideman, R. Baets
Title: Total reflection mirrors fabricated on silica waveguides with focused ion beam
Format: International Journal
Publication date: 8/2009
Journal/Conference/Book: Electronics Letters
Volume(Issue): 45(17) p.883-884
Internal Reference: [N-894]
Download: Download this Publication (158KB) (158KB)


Efficient total reflection mirrors are fabricated on silica-based waveguides by direct milling with a focused ion beam. To reduce the excess losses of the mirrors, a two-step milling technique is employed that reduces the roughness of the mirror surface while maintaining a high milling rate. A focused ion beam is used to fabricate low-loss mirrors with small excess losses of about 1.0 dB.

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