Authors:	T. Claes, J. Girones Molera, K. De Vos, E. Schacht, R. Baets, P. Bienstman
Title:	Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator
Format:	International Journal
Publication date:	9/2009
Journal/Conference/Book:	IEEE Photonics Journal
Editor/Publisher:	IEEE,
Volume(Issue):	1(3) p.197-204
DOI:	10.1109/JPHOT.2009.2031596
Citations:	347 (Dimensions.ai - last update: 14/4/2024) 197 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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Abstract

We present a slot-waveguide-based ring resonator in silicon on insulator (SOI) with a footprint of only 13 µm times 10 µm, fabricated with optical lithography. Experiments show that it has 298 nm/RIU sensitivity and a detection limit of 4.2 e-5 RIU for changes in the refractive index of the top cladding. We prove for the first time that surface chemistry for selective label-free sensing of proteins can be applied inside a 100 nm-wide slot region and demonstrate that the application of a slot waveguide instead of a normal waveguide increases the sensitivity of an SOI ring resonator with a factor 3.5 for the detection of proteins.

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