| Authors: | K. De Vos, P.P.P. Debackere, R. Baets, P. Bienstman | | Title: | Label-free biosensors on Silicon-on-Insulator optical chips based on microring cavities and surface plasmon interferometry | | Format: | International Conference Proceedings | | Publication date: | 6/2008 | | Journal/Conference/Book: | ICTON 2008
(invited)
| | Volume(Issue): | 2 p.88-91 | | Location: | Athens, Greece | | DOI: | 10.1109/icton.2008.4598599 | | Citations: | 2 (Dimensions.ai - last update: 21/4/2024)
1 (OpenCitations - last update: 3/5/2024)
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Abstract
To come up to the demand for extremely sensitive biosensors for parallel real-time bioanalyses, we present two configurations of label-free biosensors on Silicon-on-Insulator optical chips. We discuss results on microring resonators and the design and fabrication of an integrated Surface Plasmon Resonance interferometer. The high refractive index contrast material offers submicron-size features with high quality for dense integration, high sensitivity and detection with very low analyte volumes. Fabrication with Deep UV lithography allows for mass production of cheap disposable biochips. Related Research Topics
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