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Authors: K. De Vos, P.P.P. Debackere, R. Baets, P. Bienstman
Title: Label-free biosensors on Silicon-on-Insulator optical chips based on microring cavities and surface plasmon interferometry
Format: International Conference Proceedings
Publication date: 6/2008
Journal/Conference/Book: ICTON 2008 (invited)
Volume(Issue): 2 p.88-91
Location: Athens, Greece
Internal Reference: [N-721]
Download: Download this Publication (325KB) (325KB)

Abstract

To come up to the demand for extremely sensitive biosensors for parallel real-time bioanalyses, we present two configurations of label-free biosensors on Silicon-on-Insulator optical chips. We discuss results on microring resonators and the design and fabrication of an integrated Surface Plasmon Resonance interferometer. The high refractive index contrast material offers submicron-size features with high quality for dense integration, high sensitivity and detection with very low analyte volumes. Fabrication with Deep UV lithography allows for mass production of cheap disposable biochips.

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